跳转到主要内容

新ANSI、ESDA、JEDEC JS-002 CDM测试标准概览

由 winniewei 提交于

<p><span>作者：</span><strong><span>Alan Righter</span></strong><strong><span>、</span></strong><strong><span>Brett Carn</span></strong><span>及</span><strong><span>EOS/ESD</span></strong><strong><span>协会</span></strong></p>

<p><span>元件充电模式</span><span>(CDM) ESD</span><span>被认为是代表</span><span>ESD</span><span>充电和快速放电的首要实际</span><span>ESD</span><span>模型，能够恰如其分地表示当今集成电路</span><span>(IC)</span><span>制造和装配中使用的自动处理设备所发生的情况。到目前为止，在制造环境下的器件处理过程中，</span><span>IC</span><span>的</span><span>ESD</span><span>损害的最大原因是来自充电器件事件，这一点已广为人知。</span><span>1</span></p>

<p><strong><span>充电器件模型路线图</span></strong></p>

<p><span>对</span><span>IC</span><span>中更高速</span><span>IO</span><span>的不断增长的需求，以及单个封装中集成更多功能的需要，推动封装尺寸变大，因而维持</span><span>JEP1572, 3</span><span>中讨论的推荐目标</span><span>CDM</span><span>级别将是一个挑战。还应注意，虽然技术扩展对目标级别可能没有直接影响（至少低至</span><span>14 nm</span><span>），但这些高级技术改进了晶体管性能，进而也能支持更高</span><span>IO</span><span>性能（传输速率），因此对</span><span>IO</span><span>设计人员而言，实现当前目标级别同样变得很困难。由于不同测试仪的充电电阻不一致，已公布的</span><span>ESD</span><span>协会</span><span>(ESDA)</span><span>截止</span><span>20204</span><span>年路线图建议，</span><span>CDM</span><span>目标级别将需要再次降低，如图</span><span>1</span><span>所示。</span></p>

<p><span><img alt="图1.2010年及以后的充电器件模型灵敏度限值预测（版权所有©2016 EOS/ESD协会）" data-entity-type="file" data-entity-uuid="e4ad1a55-7fb3-4c55-a85d-59a0e8f5c64d" src="http://new.eetrend.com/files/2021-02/wen_zhang_/100061764-122383-1.jpg&…; /><br />
<!--[endif]--></span></p>

<p><em><span>图</span></em><em><span>1.2010</span></em><em><span>年及以后的充电器件模型灵敏度限值预测（版权所有</span></em><em><span>©</span></em><em><span>2016 EOS/ESD</span></em><em><span>协会）</span></em></p>

<p><span>快速浏览图</span><span>1</span><span>不会发现</span><span>CDM</span><span>目标级别有明显变化，但进一步查阅</span><span>ESDA</span><span>提供的数据（如图</span><span>2</span><span>所示）可知，</span><span>CDM ESD</span><span>目标级别的分布预期会有重大变化。</span></p>

<p><span><img alt="图2.充电器件模型灵敏度分布组别前瞻（版权所有©2016 EOS/ESD协会）" data-entity-type="file" data-entity-uuid="00d584ec-7c7f-4fcc-bb7c-35d0410376c7" src="http://new.eetrend.com/files/2021-02/wen_zhang_/100061764-122384-2.jpg&…; /><br />
<!--[endif]--></span></p>

<p><em><span>图</span></em><em><span>2.</span></em><em><span>充电器件模型灵敏度分布组别前瞻（版权所有</span></em><em><span>©</span></em><em><span>2016 EOS/ESD</span></em><em><span>协会）</span></em></p>

<p><span>为何讨论此变化很重要？它指出了需要采用一致的方法来测试整个电子行业的</span><span>CDM</span><span>，应排除多种测试标准所带来的一些不一致性。现在，确保制造业针对</span><span>ESDA</span><span>讨论的</span><span>CDM</span><span>路线图做好适当准备比以往任何时候都更重要。这种准备的一个关键方面是确保制造业从各半导体制造商收到的关于器件</span><span>CDM</span><span>鲁棒性水平的数据是一致的。对一个协调一致的</span><span>CDM</span><span>标准的需求从来没有像现在这样强烈。再加上持续不断的技术进步，</span><span>IO</span><span>性能也会得到提高。这种对更高</span><span>IO</span><span>性能的需要（以及降低引脚电容的需要），迫使</span><span>IC</span><span>设计人员别无选择，只能降低目标级别，进而需要更精密的测量（在</span><span>ANSI/ESDA/JEDEC JS-002</span><span>中有说明）。</span></p>

<p><strong><span>新联合标准</span></strong></p>

<p><span>在</span><span lang="EN-US" xml:lang="EN-US">ANSI/ESDA/JEDEC JS-002</span><span>之前有四种现存标准</span><span>：</span><span>传统的</span><span lang="EN-US" xml:lang="EN-US">JEDEC (JESD22-C101)5</span><span>、</span><span lang="EN-US" xml:lang="EN-US">ESDA S5.3.16</span><span>、</span><span lang="EN-US" xml:lang="EN-US">AEC Q100-0117</span><span>和</span><span lang="EN-US" xml:lang="EN-US">EIAJ ED-4701/300-2</span><span>标准</span><span lang="EN-US" xml:lang="EN-US">8</span><span>。</span><span>ANSI/ESDA/JEDEC JS-002</span><span>（充电器件模型、器件级别）</span><span>9</span><span>代表了将这四种现有标准统一为单一标准的一次重大努力。虽然所有这些标准都产生了有价值的信息，但多种标准的存在对行业不是好事。不同方法常常产生不同的通过级别，多种标准的存在要求制造商支持不同的测试方法，而有意义的信息并无增加。因此，以下两点非常重要：</span><span>IC</span><span>充电器件抑制能力的单一测量水平是广为人知的，以确保</span><span>CDM ESD</span><span>设计策略得到正确实施；</span><span>IC</span><span>的充电器件抑制能力同它将接触到的制造环境中的</span><span>ESD</span><span>控制水平一致。</span></p>

<p><span>为了解决这个问题，</span><span>2009</span><span>年成立的</span><span>ESDA</span><span>和</span><span>JEDEC CDM</span><span>联合工作小组</span><span>(JWG)</span><span>开发了</span><span>JS-002</span><span>。此外，</span><span>JWG</span><span>希望根据引入场感应</span><span>CDM (FICDM)</span><span>以来所获得的经验教训对</span><span>FICDM</span><span>进行技术改进</span><span>10</span><span>。最后，</span><span>JWG</span><span>希望尽量减少对电子行业的冲击。为了减少行业冲击，工作小组决定，联合标准不应要求购买全新场感应</span><span>CDM</span><span>测试仪，并且通过</span><span>/</span><span>失败水平应尽可能与</span><span>JEDEC CDM</span><span>标准一致。</span><span>JEDEC</span><span>标准是使用最广泛的</span><span>CDM</span><span>标准，因此</span><span>JS-002</span><span>与当前制造业对</span><span>CDM</span><span>的理解保持一致。</span></p>

<p><span>虽然</span><span lang="EN-US" xml:lang="EN-US">JEDEC</span><span>和</span><span lang="EN-US" xml:lang="EN-US">ESDA</span><span>的测试方法非常相似</span><span>，</span><span>但两种标准之间有一些不同之处需要化解。</span><span lang="EN-US" xml:lang="EN-US">JS-002</span><span>还试图解决一些技术问题。一些最重要问题列示如下。</span></p>

<p><strong><span>标准之间的差异</span></strong></p>

<p><!--[if !supportLists]--><span><span>►<span>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; </span></span></span><!--[endif]--><span>场板电介质厚度</span></p>

<p><!--[if !supportLists]--><span><span>►<span>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; </span></span></span><!--[endif]--><span>用于验证系统的验证模块</span></p>

<p><!--[if !supportLists]--><span><span>►<span>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; </span></span></span><!--[endif]--><span>示波器带宽要求</span></p>

<p><!--[if !supportLists]--><span><span>►<span>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; </span></span></span><!--[endif]--><span>波形验证参数</span></p>

<p><strong><span>标准的技术问题</span></strong></p>

<p><!--[if !supportLists]--><span><span>►<span>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; </span></span></span><!--[endif]--><span>测量带宽要求对</span><span>CDM</span><span>而言太慢</span></p>

<p><!--[if !supportLists]--><span><span>►<span>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; </span></span></span><!--[endif]--><span>人为地让</span><span>JEDEC</span><span>标准中的脉冲宽度很宽</span></p>

<p><span>为了达成目标并实现统一，作出了如下硬件和测量选择。在为期五年的文件编制过程中，工作小组进行了大量测量才作出这些决定。</span></p>

<p><strong><span>硬件选择</span></strong></p>

<p><!--[if !supportLists]--><span><span>►<span>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; </span></span></span><!--[endif]--><span>使用</span><span>JEDEC</span><span>电介质厚度</span></p>

<p><!--[if !supportLists]--><span><span>►<span>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; </span></span></span><!--[endif]--><span>使用</span><span>JEDEC“</span><span>硬币</span><span>”</span><span>进行波形验证</span></p>

<p><!--[if !supportLists]--><span><span>►<span>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; </span></span></span><!--[endif]--><span>禁止在放电路径中使用铁氧体</span></p>

<p><strong><span>测量选择</span></strong></p>

<p><!--[if !supportLists]--><span><span>►<span>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; </span></span></span><!--[endif]--><span>系统验证</span><span>/</span><span>验收需要最低</span><span>6 GHz</span><span>带宽的示波器</span></p>

<p><!--[if !supportLists]--><span><span>►<span>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; </span></span></span><!--[endif]--><span>例行系统验证允许使用</span><span>1 GHz</span><span>示波器</span><span> </span></p>

<p><strong><span>尽量减少数据损坏并讨论隐藏电压调整</span></strong><strong><span> </span></strong></p>

<p><!--[if !supportLists]--><span><span>►<span>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; </span></span></span><!--[endif]--><span>让目标峰值电流与现有</span><span>JEDEC</span><span>标准一致</span></p>

<p><!--[if !supportLists]--><span><span>►<span>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; </span></span></span><!--[endif]--><span>指定与</span><span>JEDEC</span><span>压力级别匹配的测试条件；对于</span><span>JS-002</span><span>测试结果，指的是测试条件</span><span>(TC)</span><span>；对于</span><span>JEDEC</span><span>和</span><span>AEC</span><span>，指的是伏特</span><span>(V)</span></p>

<p><!--[if !supportLists]--><span><span>►<span>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; </span></span></span><!--[endif]--><span>对于</span><span>JS-002</span><span>，调整场板电压以提供与传统</span><span>JEDEC</span><span>峰值电流要求对应的正确峰值电流</span></p>

<p><strong><span>确保较大封装完全充电</span></strong></p>

<p><!--[if !supportLists]--><span><span>►<span>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; </span></span></span><!--[endif]--><span>为确保较大封装完全充电，引入了一个新的程序</span></p>

<p><span>下面说明这些改进。</span></p>

<p><strong><span lang="EN-US" xml:lang="EN-US">JS-002</span></strong><strong><span>硬件选择</span></strong></p>

<p><span>JS-002 CDM</span><span>硬件平台代表了</span><span>ESDA S5.3.1</span><span>探针组件或测试头放电探针同</span><span>JEDEC JESD22-C101</span><span>验证模块和场板电介质的结合。图</span><span>3</span><span>所示为硬件对比。</span><span>ESDA</span><span>探针组件的放电路径中没有特定铁氧体。</span><span>FICDM</span><span>测试仪制造商认为，铁氧体是必要的，增加铁氧体可提高</span><span>500 ps</span><span>的半峰全宽</span><span>(FWHH)</span><span>额定最小值，并将</span><span>Ip2</span><span>（第二波峰）降至第一波峰</span><span>Ip1</span><span>的</span><span>50%</span><span>以下，从而满足传统</span><span>JEDEC</span><span>要求。</span><span>JS-002</span><span>去掉了此铁氧体，从而消除了放电中的这种限制因素，使得放电波形更准确，高带宽示波器在</span><span>Ip1</span><span>时看到的振铃现象不再存在。</span></p>

<p><strong><span><img alt="图3.JEDEC和JS-002平台硬件原理图" data-entity-type="file" data-entity-uuid="cfe670d7-0204-4a23-bacf-d31c7467bcaa" src="http://new.eetrend.com/files/2021-02/wen_zhang_/100061764-122385-3.jpg&…; /><br />
<!--[endif]--></span></strong></p>

<p><em><span>图</span></em><em><span lang="EN-US" xml:lang="EN-US">3.JEDEC</span></em><em><span>和</span></em><em><span lang="EN-US" xml:lang="EN-US">JS-002</span></em><em><span>平台硬件原理图</span></em></p>

<p><span>图</span><span>4</span><span>显示了</span><span>ESDA</span><span>和</span><span>JEDEC CDM</span><span>标准验证模块的区别。</span><span>ESDA</span><span>标准提供两个电介质厚度选项，并结合验证模块（第二个选项是模块和场板之间有一层最多</span><span>130 μm</span><span>的额外塑料薄膜，用于测试带金属封装盖的器件）。</span><span>JEDEC</span><span>验证模块</span><span>/FR4</span><span>电介质代表一个单一小</span><span>/</span><span>大验证模块和电介质选项，支持它的</span><span>JEDEC</span><span>标准用户要多得多。</span></p>

<p><em><span><img alt="图4.ESDA和JEDEC验证模块比较JS-002使用JEDEC模块。" data-entity-type="file" data-entity-uuid="763adfb0-dd4b-46ae-abfc-1b997adcd07e" src="http://new.eetrend.com/files/2021-02/wen_zhang_/100061764-122386-4.jpg&…; /><br />
<!--[endif]--></span></em></p>

<p><em><span>图</span></em><em><span>4.ESDA</span></em><em><span>和</span></em><em><span>JEDEC</span></em><em><span>验证模块比较</span></em><em><span>JS-002</span></em><em><span>使用</span></em><em><span>JEDEC</span></em><em><span>模块。</span></em></p>

<p><strong><span><span>&nbsp;</span>JS-002</span></strong><strong><span>测量选择</span></strong></p>

<p><span>在</span><span lang="EN-US" xml:lang="EN-US">JS-002</span><span>标准制定的数据收集阶段</span><span>，</span><span lang="EN-US" xml:lang="EN-US">CDM JWG</span><span>发现需要更高带宽的示波器才能精确测量</span><span lang="EN-US" xml:lang="EN-US">CDM</span><span>波形。</span><span lang="EN-US" xml:lang="EN-US">1 GHz</span><span>带宽示波器未能捕捉到真正的第一峰值。图</span><span lang="EN-US" xml:lang="EN-US">5</span><span>和图</span><span lang="EN-US" xml:lang="EN-US">6</span><span>说明了这一点。</span></p>

<p><span><img alt="图5.大JEDEC验证模块在500 V JEDEC时与JS-002 TC500在1 GHz时的CDM波形" data-entity-type="file" data-entity-uuid="51709417-8c0f-4c86-8763-9051c341424a" src="http://new.eetrend.com/files/2021-02/wen_zhang_/100061764-122387-5.jpg&…; /><br />
<!--[endif]--></span></p>

<p><em><span>图</span></em><em><span>5.</span></em><em><span>大</span></em><em><span>JEDEC</span></em><em><span>验证模块在</span></em><em><span>500 V JEDEC</span></em><em><span>时与</span></em><em><span>JS-002 TC500</span></em><em><span>在</span></em><em><span>1 GHz</span></em><em><span>时的</span></em><em><span>CDM</span></em><em><span>波形</span></em></p>

<p><span><img alt="图6.大JEDEC验证模块在500 V JEDEC时与JS-002 TC500在6 GHz时的CDM波形" data-entity-type="file" data-entity-uuid="a2fffcd4-ab6e-46aa-809e-43cb647f9619" src="http://new.eetrend.com/files/2021-02/wen_zhang_/100061764-122388-6.jpg&…; /><br />
<!--[endif]--></span></p>

<p><em><span>图</span></em><em><span>6.</span></em><em><span>大</span></em><em><span>JEDEC</span></em><em><span>验证模块在</span></em><em><span>500 V JEDEC</span></em><em><span>时与</span></em><em><span>JS-002 TC500</span></em><em><span>在</span></em><em><span>6 GHz</span></em><em><span>时的</span></em><em><span>CDM</span></em><em><span>波形</span></em></p>

<p><span>例行波形检查，例如每日或每周的检查，仍可利用</span><span>1 GHz</span><span>带宽示波器进行。然而，对不同实验室测试站点的分析表明，高带宽示波器能提供更好的站点间相关性。</span><span>11</span><span>例行检查和季度检查推荐使用高带宽示波器。年度验证或更换</span><span>/</span><span>修理测试仪硬件之后的验证需要高带宽示波器。</span></p>

<p><strong><span>表</span></strong><strong><span>1.JS-002</span></strong><strong><span>波形数据记录表示例，显示了造成</span></strong><strong><span>TC</span></strong><strong><span>（测试条件）电压的因素</span></strong><strong><span>9</span></strong></p>

<table border="1" cellpadding="0" cellspacing="0" class="MsoNormalTable" style="border-collapse:collapse;mso-table-layout-alt:fixed;border:none;
mso-border-alt:solid windowtext .5pt;mso-yfti-tbllook:1184;mso-padding-alt:
0cm 5.4pt 0cm 5.4pt;mso-border-insideh:.5pt solid windowtext;mso-border-insidev:
.5pt solid windowtext">
<tbody>
<tr style="mso-yfti-irow:0;mso-yfti-firstrow:yes">
<td colspan="10" style="width:514.6pt;border:solid windowtext 1.0pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="686">
<p align="center" class="Default" style="text-align:center"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;font-family:宋体;mso-ascii-font-family:
Arial;mso-hansi-font-family:Arial;layout-grid-mode:both">测试仪</span><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;font-family:&quot;Arial&quot;,sans-serif;
mso-bidi-font-family:&quot;HelveticaNeueLT Std Cn&quot;;layout-grid-mode:both">—</span><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;font-family:宋体;mso-ascii-font-family:
Arial;mso-hansi-font-family:Arial;layout-grid-mode:both">系统</span><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;font-family:&quot;Arial&quot;,sans-serif;
mso-bidi-font-family:&quot;HelveticaNeueLT Std Cn&quot;;layout-grid-mode:both">#1</span><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;font-family:&quot;Arial&quot;,sans-serif;
mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
</tr>
<tr style="mso-yfti-irow:1">
<td colspan="2" style="width:102.9pt;border:solid windowtext 1.0pt;
border-top:none;mso-border-top-alt:solid windowtext .5pt;mso-border-alt:solid windowtext .5pt;
padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="137">
<p align="center" class="Default" style="text-align:center"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;font-family:宋体;mso-ascii-font-family:
Arial;mso-hansi-font-family:Arial;layout-grid-mode:both">极性</span><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;font-family:&quot;Arial&quot;,sans-serif;
mso-bidi-font-family:&quot;HelveticaNeueLT Std Cn&quot;;layout-grid-mode:both"> = </span><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;font-family:宋体;mso-ascii-font-family:
Arial;mso-hansi-font-family:Arial;layout-grid-mode:both">正</span><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;font-family:&quot;Arial&quot;,sans-serif;
mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td colspan="4" style="width:205.8pt;border-top:none;
border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="274">
<p align="center" class="Default" style="text-align:center"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;font-family:宋体;mso-ascii-font-family:
Arial;mso-hansi-font-family:Arial;layout-grid-mode:both">示波器带宽</span><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;font-family:&quot;Arial&quot;,sans-serif;
mso-bidi-font-family:&quot;HelveticaNeueLT Std Cn&quot;;layout-grid-mode:both"> = 8 GHz</span><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;font-family:&quot;Arial&quot;,sans-serif;
mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td colspan="4" style="width:205.9pt;border-top:none;
border-left:none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="275">
<p align="center" class="Default" style="text-align:center"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;font-family:宋体;mso-ascii-font-family:
Arial;mso-hansi-font-family:Arial;layout-grid-mode:both">因子</span><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;font-family:&quot;Arial&quot;,sans-serif;
mso-bidi-font-family:&quot;HelveticaNeueLT Std Cn&quot;;layout-grid-mode:both">/</span><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;font-family:宋体;mso-ascii-font-family:
Arial;mso-hansi-font-family:Arial;layout-grid-mode:both">失调最终设置</span><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;font-family:&quot;Arial&quot;,sans-serif;
mso-bidi-font-family:&quot;HelveticaNeueLT Std Cn&quot;;layout-grid-mode:both"> = 0.82</span><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;font-family:&quot;Arial&quot;,sans-serif;
mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
</tr>
<tr style="mso-yfti-irow:2">
<td style="width:51.45pt;border:solid windowtext 1.0pt;
border-top:none;mso-border-top-alt:solid windowtext .5pt;mso-border-alt:solid windowtext .5pt;
padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:宋体;mso-ascii-font-family:Arial;mso-hansi-font-family:Arial;
layout-grid-mode:both">模块大小</span><span style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:宋体;mso-ascii-font-family:Arial;mso-hansi-font-family:Arial;
layout-grid-mode:both">日期</span><span style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;HelveticaNeueLT Std Cn&quot;;
layout-grid-mode:both">%RH</span><span style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:宋体;mso-ascii-font-family:Arial;mso-hansi-font-family:Arial;
layout-grid-mode:both">测试条件</span><span style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:宋体;mso-ascii-font-family:Arial;mso-hansi-font-family:Arial;
layout-grid-mode:both">软件电压</span><span style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span lang="EN-US" style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;HelveticaNeueLT Std Cn&quot;;
mso-ansi-language:EN-US;layout-grid-mode:both">I<sub>P AVG</sub> (A)</span><span lang="EN-US" style="font-size:10.5pt;mso-bidi-font-size:12.0pt;font-family:
&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;;mso-ansi-language:
EN-US"><o:p></o:p></span></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span lang="EN-US" style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;HelveticaNeueLT Std Cn&quot;;
mso-ansi-language:EN-US;layout-grid-mode:both">T <sub>R AVG</sub></span><span lang="EN-US" style="font-size:10.5pt;mso-bidi-font-size:12.0pt;font-family:
&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;;mso-ansi-language:
EN-US"><o:p></o:p></span></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;HelveticaNeueLT Std Cn&quot;;
layout-grid-mode:both">T<sub>D AVG</sub></span><span style="font-size:10.5pt;
mso-bidi-font-size:12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:
&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.5pt;border-top:none;border-left:none;
border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;HelveticaNeueLT Std Cn&quot;;
layout-grid-mode:both">I<sub>P2 AVG</sub></span><span style="font-size:10.5pt;
mso-bidi-font-size:12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:
&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.5pt;border-top:none;border-left:none;
border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;HelveticaNeueLT Std Cn&quot;;
layout-grid-mode:both">I<sub>P2</sub> (% I<sub>P1</sub>)</span><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;font-family:&quot;Arial&quot;,sans-serif;
mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
</tr>
<tr style="mso-yfti-irow:3">
<td style="width:51.45pt;border:solid windowtext 1.0pt;
border-top:none;mso-border-top-alt:solid windowtext .5pt;mso-border-alt:solid windowtext .5pt;
padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:宋体;mso-ascii-font-family:Arial;mso-hansi-font-family:Arial;
layout-grid-mode:both">大</span><span style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="MsoNormal"><span style="font-family:宋体;mso-ascii-font-family:Arial;
mso-hansi-font-family:Arial;layout-grid-mode:both">日</span><span style="font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;;
layout-grid-mode:both">/</span><span style="font-family:宋体;mso-ascii-font-family:
Arial;mso-hansi-font-family:Arial;layout-grid-mode:both">月</span><span style="font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;;
layout-grid-mode:both">/</span><span style="font-family:宋体;mso-ascii-font-family:
Arial;mso-hansi-font-family:Arial;layout-grid-mode:both">年</span><span style="mso-bidi-font-size:12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:
&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;HelveticaNeueLT Std Cn&quot;;
layout-grid-mode:both">X%</span><span style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;HelveticaNeueLT Std Cn&quot;;
layout-grid-mode:both">TC 500</span><span style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;HelveticaNeueLT Std Cn&quot;;
layout-grid-mode:both">500</span><span style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p align="left" class="MsoNormal" style="text-align:left;mso-layout-grid-align:
none;text-autospace:none"><span style="font-family:&quot;Arial&quot;,sans-serif;
mso-bidi-font-family:&quot;Times New Roman&quot;;layout-grid-mode:both">12.1</span><span style="mso-bidi-font-size:12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:
&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;HelveticaNeueLT Std Cn&quot;;
layout-grid-mode:both">275</span><span style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;HelveticaNeueLT Std Cn&quot;;
layout-grid-mode:both">610</span><span style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.5pt;border-top:none;border-left:none;
border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;HelveticaNeueLT Std Cn&quot;;
layout-grid-mode:both">4.3</span><span style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.5pt;border-top:none;border-left:none;
border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;HelveticaNeueLT Std Cn&quot;;
layout-grid-mode:both">36%</span><span style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
</tr>
<tr style="mso-yfti-irow:4">
<td style="width:51.45pt;border:solid windowtext 1.0pt;
border-top:none;mso-border-top-alt:solid windowtext .5pt;mso-border-alt:solid windowtext .5pt;
padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:宋体;mso-ascii-font-family:Arial;mso-hansi-font-family:Arial;
layout-grid-mode:both">小</span><span style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="MsoNormal"><span style="font-family:宋体;mso-ascii-font-family:Arial;
mso-hansi-font-family:Arial;layout-grid-mode:both">日</span><span style="font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;;
layout-grid-mode:both">/</span><span style="font-family:宋体;mso-ascii-font-family:
Arial;mso-hansi-font-family:Arial;layout-grid-mode:both">月</span><span style="font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;;
layout-grid-mode:both">/</span><span style="font-family:宋体;mso-ascii-font-family:
Arial;mso-hansi-font-family:Arial;layout-grid-mode:both">年</span><o:p></o:p></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="MsoNormal"><span style="font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:
&quot;Times New Roman&quot;;layout-grid-mode:both">X%</span><o:p></o:p></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;HelveticaNeueLT Std Cn&quot;;
layout-grid-mode:both">TC 500</span><span style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;HelveticaNeueLT Std Cn&quot;;
layout-grid-mode:both">500</span><span style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p align="left" class="MsoNormal" style="text-align:left;mso-layout-grid-align:
none;text-autospace:none"><span style="font-family:&quot;Arial&quot;,sans-serif;
mso-bidi-font-family:&quot;Times New Roman&quot;;layout-grid-mode:both">7.30</span><span style="mso-bidi-font-size:12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:
&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;HelveticaNeueLT Std Cn&quot;;
layout-grid-mode:both">185</span><span style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;HelveticaNeueLT Std Cn&quot;;
layout-grid-mode:both">400</span><span style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.5pt;border-top:none;border-left:none;
border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;HelveticaNeueLT Std Cn&quot;;
layout-grid-mode:both">3.7</span><span style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.5pt;border-top:none;border-left:none;
border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;HelveticaNeueLT Std Cn&quot;;
layout-grid-mode:both">51%</span><span style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
</tr>
<tr style="mso-yfti-irow:5">
<td style="width:51.45pt;border:solid windowtext 1.0pt;
border-top:none;mso-border-top-alt:solid windowtext .5pt;mso-border-alt:solid windowtext .5pt;
padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:宋体;mso-ascii-font-family:Arial;mso-hansi-font-family:Arial;
layout-grid-mode:both">大</span><span style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="MsoNormal"><span style="font-family:宋体;mso-ascii-font-family:Arial;
mso-hansi-font-family:Arial;layout-grid-mode:both">日</span><span style="font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;;
layout-grid-mode:both">/</span><span style="font-family:宋体;mso-ascii-font-family:
Arial;mso-hansi-font-family:Arial;layout-grid-mode:both">月</span><span style="font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;;
layout-grid-mode:both">/</span><span style="font-family:宋体;mso-ascii-font-family:
Arial;mso-hansi-font-family:Arial;layout-grid-mode:both">年</span><o:p></o:p></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="MsoNormal"><span style="font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:
&quot;Times New Roman&quot;;layout-grid-mode:both">X%</span><o:p></o:p></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;HelveticaNeueLT Std Cn&quot;;
layout-grid-mode:both">TC 125</span><span style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;HelveticaNeueLT Std Cn&quot;;
layout-grid-mode:both">125</span><span style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p align="left" class="MsoNormal" style="text-align:left;mso-layout-grid-align:
none;text-autospace:none"><span style="font-family:&quot;Arial&quot;,sans-serif;
mso-bidi-font-family:&quot;Times New Roman&quot;;layout-grid-mode:both">2.90</span><span style="mso-bidi-font-size:12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:
&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;HelveticaNeueLT Std Cn&quot;;
layout-grid-mode:both">283</span><span style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;HelveticaNeueLT Std Cn&quot;;
layout-grid-mode:both">611</span><span style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.5pt;border-top:none;border-left:none;
border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;HelveticaNeueLT Std Cn&quot;;
layout-grid-mode:both">1.1</span><span style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.5pt;border-top:none;border-left:none;
border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;HelveticaNeueLT Std Cn&quot;;
layout-grid-mode:both">38%</span><span style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
</tr>
<tr style="mso-yfti-irow:6">
<td style="width:51.45pt;border:solid windowtext 1.0pt;
border-top:none;mso-border-top-alt:solid windowtext .5pt;mso-border-alt:solid windowtext .5pt;
padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:宋体;mso-ascii-font-family:Arial;mso-hansi-font-family:Arial;
layout-grid-mode:both">小</span><span style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="MsoNormal"><span style="font-family:宋体;mso-ascii-font-family:Arial;
mso-hansi-font-family:Arial;layout-grid-mode:both">日</span><span style="font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;;
layout-grid-mode:both">/</span><span style="font-family:宋体;mso-ascii-font-family:
Arial;mso-hansi-font-family:Arial;layout-grid-mode:both">月</span><span style="font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;;
layout-grid-mode:both">/</span><span style="font-family:宋体;mso-ascii-font-family:
Arial;mso-hansi-font-family:Arial;layout-grid-mode:both">年</span><o:p></o:p></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="MsoNormal"><span style="font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:
&quot;Times New Roman&quot;;layout-grid-mode:both">X%</span><o:p></o:p></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;HelveticaNeueLT Std Cn&quot;;
layout-grid-mode:both">TC 125</span><span style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;HelveticaNeueLT Std Cn&quot;;
layout-grid-mode:both">125</span><span style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p align="left" class="MsoNormal" style="text-align:left;mso-layout-grid-align:
none;text-autospace:none"><span style="font-family:&quot;Arial&quot;,sans-serif;
mso-bidi-font-family:&quot;Times New Roman&quot;;layout-grid-mode:both">1.90</span><span style="mso-bidi-font-size:12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:
&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;HelveticaNeueLT Std Cn&quot;;
layout-grid-mode:both">201</span><span style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;HelveticaNeueLT Std Cn&quot;;
layout-grid-mode:both">395</span><span style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.5pt;border-top:none;border-left:none;
border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;HelveticaNeueLT Std Cn&quot;;
layout-grid-mode:both">1.1</span><span style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.5pt;border-top:none;border-left:none;
border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;HelveticaNeueLT Std Cn&quot;;
layout-grid-mode:both">58%</span><span style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
</tr>
<tr style="mso-yfti-irow:7">
<td style="width:51.45pt;border:solid windowtext 1.0pt;
border-top:none;mso-border-top-alt:solid windowtext .5pt;mso-border-alt:solid windowtext .5pt;
padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:宋体;mso-ascii-font-family:Arial;mso-hansi-font-family:Arial;
layout-grid-mode:both">大</span><span style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="MsoNormal"><span style="font-family:宋体;mso-ascii-font-family:Arial;
mso-hansi-font-family:Arial;layout-grid-mode:both">日</span><span style="font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;;
layout-grid-mode:both">/</span><span style="font-family:宋体;mso-ascii-font-family:
Arial;mso-hansi-font-family:Arial;layout-grid-mode:both">月</span><span style="font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;;
layout-grid-mode:both">/</span><span style="font-family:宋体;mso-ascii-font-family:
Arial;mso-hansi-font-family:Arial;layout-grid-mode:both">年</span><o:p></o:p></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="MsoNormal"><span style="font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:
&quot;Times New Roman&quot;;layout-grid-mode:both">X%</span><o:p></o:p></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;HelveticaNeueLT Std Cn&quot;;
layout-grid-mode:both">TC 250</span><span style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;HelveticaNeueLT Std Cn&quot;;
layout-grid-mode:both">250</span><span style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p align="left" class="MsoNormal" style="text-align:left;mso-layout-grid-align:
none;text-autospace:none"><span style="font-family:&quot;Arial&quot;,sans-serif;
mso-bidi-font-family:&quot;Times New Roman&quot;;layout-grid-mode:both">6.00</span><span style="mso-bidi-font-size:12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:
&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;HelveticaNeueLT Std Cn&quot;;
layout-grid-mode:both">276</span><span style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;HelveticaNeueLT Std Cn&quot;;
layout-grid-mode:both">609</span><span style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.5pt;border-top:none;border-left:none;
border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;HelveticaNeueLT Std Cn&quot;;
layout-grid-mode:both">2.2</span><span style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.5pt;border-top:none;border-left:none;
border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;HelveticaNeueLT Std Cn&quot;;
layout-grid-mode:both">37%</span><span style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
</tr>
<tr style="mso-yfti-irow:8">
<td style="width:51.45pt;border:solid windowtext 1.0pt;
border-top:none;mso-border-top-alt:solid windowtext .5pt;mso-border-alt:solid windowtext .5pt;
padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:宋体;mso-ascii-font-family:Arial;mso-hansi-font-family:Arial;
layout-grid-mode:both">小</span><span style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="MsoNormal"><span style="font-family:宋体;mso-ascii-font-family:Arial;
mso-hansi-font-family:Arial;layout-grid-mode:both">日</span><span style="font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;;
layout-grid-mode:both">/</span><span style="font-family:宋体;mso-ascii-font-family:
Arial;mso-hansi-font-family:Arial;layout-grid-mode:both">月</span><span style="font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;;
layout-grid-mode:both">/</span><span style="font-family:宋体;mso-ascii-font-family:
Arial;mso-hansi-font-family:Arial;layout-grid-mode:both">年</span><o:p></o:p></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="MsoNormal"><span style="font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:
&quot;Times New Roman&quot;;layout-grid-mode:both">X%</span><o:p></o:p></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;HelveticaNeueLT Std Cn&quot;;
layout-grid-mode:both">TC 250</span><span style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;HelveticaNeueLT Std Cn&quot;;
layout-grid-mode:both">250</span><span style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p align="left" class="MsoNormal" style="text-align:left;mso-layout-grid-align:
none;text-autospace:none"><span style="font-family:&quot;Arial&quot;,sans-serif;
mso-bidi-font-family:&quot;Times New Roman&quot;;layout-grid-mode:both">3.70</span><span style="mso-bidi-font-size:12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:
&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;HelveticaNeueLT Std Cn&quot;;
layout-grid-mode:both">186</span><span style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;HelveticaNeueLT Std Cn&quot;;
layout-grid-mode:both">397</span><span style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.5pt;border-top:none;border-left:none;
border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;HelveticaNeueLT Std Cn&quot;;
layout-grid-mode:both">2.1</span><span style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.5pt;border-top:none;border-left:none;
border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;HelveticaNeueLT Std Cn&quot;;
layout-grid-mode:both">57%</span><span style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
</tr>
<tr style="mso-yfti-irow:9">
<td style="width:51.45pt;border:solid windowtext 1.0pt;
border-top:none;mso-border-top-alt:solid windowtext .5pt;mso-border-alt:solid windowtext .5pt;
padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:宋体;mso-ascii-font-family:Arial;mso-hansi-font-family:Arial;
layout-grid-mode:both">大</span><span style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="MsoNormal"><span style="font-family:宋体;mso-ascii-font-family:Arial;
mso-hansi-font-family:Arial;layout-grid-mode:both">日</span><span style="font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;;
layout-grid-mode:both">/</span><span style="font-family:宋体;mso-ascii-font-family:
Arial;mso-hansi-font-family:Arial;layout-grid-mode:both">月</span><span style="font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;;
layout-grid-mode:both">/</span><span style="font-family:宋体;mso-ascii-font-family:
Arial;mso-hansi-font-family:Arial;layout-grid-mode:both">年</span><o:p></o:p></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="MsoNormal"><span style="font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:
&quot;Times New Roman&quot;;layout-grid-mode:both">X%</span><o:p></o:p></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;HelveticaNeueLT Std Cn&quot;;
layout-grid-mode:both">TC 750</span><span style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;HelveticaNeueLT Std Cn&quot;;
layout-grid-mode:both">750</span><span style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p align="left" class="MsoNormal" style="text-align:left;mso-layout-grid-align:
none;text-autospace:none"><span style="font-family:&quot;Arial&quot;,sans-serif;
mso-bidi-font-family:&quot;Times New Roman&quot;;layout-grid-mode:both">18.30</span><span style="mso-bidi-font-size:12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:
&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;HelveticaNeueLT Std Cn&quot;;
layout-grid-mode:both">274</span><span style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;HelveticaNeueLT Std Cn&quot;;
layout-grid-mode:both">611</span><span style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.5pt;border-top:none;border-left:none;
border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;HelveticaNeueLT Std Cn&quot;;
layout-grid-mode:both">7.2</span><span style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.5pt;border-top:none;border-left:none;
border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;HelveticaNeueLT Std Cn&quot;;
layout-grid-mode:both">39%</span><span style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
</tr>
<tr style="mso-yfti-irow:10">
<td style="width:51.45pt;border:solid windowtext 1.0pt;
border-top:none;mso-border-top-alt:solid windowtext .5pt;mso-border-alt:solid windowtext .5pt;
padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:宋体;mso-ascii-font-family:Arial;mso-hansi-font-family:Arial;
layout-grid-mode:both">小</span><span style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="MsoNormal"><span style="font-family:宋体;mso-ascii-font-family:Arial;
mso-hansi-font-family:Arial;layout-grid-mode:both">日</span><span style="font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;;
layout-grid-mode:both">/</span><span style="font-family:宋体;mso-ascii-font-family:
Arial;mso-hansi-font-family:Arial;layout-grid-mode:both">月</span><span style="font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;;
layout-grid-mode:both">/</span><span style="font-family:宋体;mso-ascii-font-family:
Arial;mso-hansi-font-family:Arial;layout-grid-mode:both">年</span><o:p></o:p></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="MsoNormal"><span style="font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:
&quot;Times New Roman&quot;;layout-grid-mode:both">X%</span><o:p></o:p></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;HelveticaNeueLT Std Cn&quot;;
layout-grid-mode:both">TC 750</span><span style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;HelveticaNeueLT Std Cn&quot;;
layout-grid-mode:both">750</span><span style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p align="left" class="MsoNormal" style="text-align:left;mso-layout-grid-align:
none;text-autospace:none"><span style="font-family:&quot;Arial&quot;,sans-serif;
mso-bidi-font-family:&quot;Times New Roman&quot;;layout-grid-mode:both">11.0</span><span style="mso-bidi-font-size:12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:
&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;HelveticaNeueLT Std Cn&quot;;
layout-grid-mode:both">190</span><span style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;HelveticaNeueLT Std Cn&quot;;
layout-grid-mode:both">398</span><span style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.5pt;border-top:none;border-left:none;
border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;HelveticaNeueLT Std Cn&quot;;
layout-grid-mode:both">6.1</span><span style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.5pt;border-top:none;border-left:none;
border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;HelveticaNeueLT Std Cn&quot;;
layout-grid-mode:both">55%</span><span style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
</tr>
<tr style="mso-yfti-irow:11">
<td style="width:51.45pt;border:solid windowtext 1.0pt;
border-top:none;mso-border-top-alt:solid windowtext .5pt;mso-border-alt:solid windowtext .5pt;
padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:宋体;mso-ascii-font-family:Arial;mso-hansi-font-family:Arial;
layout-grid-mode:both">大</span><span style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="MsoNormal"><span style="font-family:宋体;mso-ascii-font-family:Arial;
mso-hansi-font-family:Arial;layout-grid-mode:both">日</span><span style="font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;;
layout-grid-mode:both">/</span><span style="font-family:宋体;mso-ascii-font-family:
Arial;mso-hansi-font-family:Arial;layout-grid-mode:both">月</span><span style="font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;;
layout-grid-mode:both">/</span><span style="font-family:宋体;mso-ascii-font-family:
Arial;mso-hansi-font-family:Arial;layout-grid-mode:both">年</span><o:p></o:p></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="MsoNormal"><span style="font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:
&quot;Times New Roman&quot;;layout-grid-mode:both">X%</span><o:p></o:p></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;HelveticaNeueLT Std Cn&quot;;
layout-grid-mode:both">TC 1000</span><span style="font-size:10.5pt;
mso-bidi-font-size:12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:
&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;HelveticaNeueLT Std Cn&quot;;
layout-grid-mode:both">1000</span><span style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p align="left" class="MsoNormal" style="text-align:left;mso-layout-grid-align:
none;text-autospace:none"><span style="font-family:&quot;Arial&quot;,sans-serif;
mso-bidi-font-family:&quot;Times New Roman&quot;;layout-grid-mode:both">24.40</span><span style="mso-bidi-font-size:12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:
&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;HelveticaNeueLT Std Cn&quot;;
layout-grid-mode:both">276</span><span style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;HelveticaNeueLT Std Cn&quot;;
layout-grid-mode:both">612</span><span style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.5pt;border-top:none;border-left:none;
border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;HelveticaNeueLT Std Cn&quot;;
layout-grid-mode:both">9.2</span><span style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.5pt;border-top:none;border-left:none;
border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;HelveticaNeueLT Std Cn&quot;;
layout-grid-mode:both">38%</span><span style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
</tr>
<tr style="mso-yfti-irow:12;mso-yfti-lastrow:yes">
<td style="width:51.45pt;border:solid windowtext 1.0pt;
border-top:none;mso-border-top-alt:solid windowtext .5pt;mso-border-alt:solid windowtext .5pt;
padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:宋体;mso-ascii-font-family:Arial;mso-hansi-font-family:Arial;
layout-grid-mode:both">小</span><span style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="MsoNormal"><span style="font-family:宋体;mso-ascii-font-family:Arial;
mso-hansi-font-family:Arial;layout-grid-mode:both">日</span><span style="font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;;
layout-grid-mode:both">/</span><span style="font-family:宋体;mso-ascii-font-family:
Arial;mso-hansi-font-family:Arial;layout-grid-mode:both">月</span><span style="font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;;
layout-grid-mode:both">/</span><span style="font-family:宋体;mso-ascii-font-family:
Arial;mso-hansi-font-family:Arial;layout-grid-mode:both">年</span><o:p></o:p></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="MsoNormal"><span style="font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:
&quot;Times New Roman&quot;;layout-grid-mode:both">X%</span><o:p></o:p></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;HelveticaNeueLT Std Cn&quot;;
layout-grid-mode:both">TC 1000</span><span style="font-size:10.5pt;
mso-bidi-font-size:12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:
&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;HelveticaNeueLT Std Cn&quot;;
layout-grid-mode:both">1000</span><span style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;HelveticaNeueLT Std Cn&quot;;
layout-grid-mode:both">14.60</span><span style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;HelveticaNeueLT Std Cn&quot;;
layout-grid-mode:both">187</span><span style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.45pt;border-top:none;border-left:
none;border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;HelveticaNeueLT Std Cn&quot;;
layout-grid-mode:both">399</span><span style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.5pt;border-top:none;border-left:none;
border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;HelveticaNeueLT Std Cn&quot;;
layout-grid-mode:both">7.4</span><span style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
<td style="width:51.5pt;border-top:none;border-left:none;
border-bottom:solid windowtext 1.0pt;border-right:solid windowtext 1.0pt;
mso-border-top-alt:solid windowtext .5pt;mso-border-left-alt:solid windowtext .5pt;
mso-border-alt:solid windowtext .5pt;padding:0cm 5.4pt 0cm 5.4pt" valign="top" width="69">
<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;HelveticaNeueLT Std Cn&quot;;
layout-grid-mode:both">51%</span><span style="font-size:10.5pt;mso-bidi-font-size:
12.0pt;font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p></o:p></span></p>
</td>
</tr>
</tbody>
</table>

<p class="Default"><span style="font-size:10.5pt;mso-bidi-font-size:12.0pt;
font-family:&quot;Arial&quot;,sans-serif;mso-bidi-font-family:&quot;Times New Roman&quot;"><o:p>&nbsp;</o:p></span><strong>测试仪</strong><strong>CDM</strong><strong>电压设置</strong></p>

<p><span>CDM JWG</span><span>同时发现，对于不同测试仪平台，为了获得符合先前</span><span>ESDA</span><span>和</span><span>JEDEC</span><span>标准的标准测试波形，实际板电压设置需要有相当大的差异（例如，特定电压设置为</span><span>100 V</span><span>或更大）。这在任何标准中都没有说明。</span><span>JS-002</span><span>唯一地确定了将第一峰值电流（以及测试条件所代表的电压）缩放到</span><span>JEDEC</span><span>峰值电流水平所需的偏移或因数。</span><span>JS-002</span><span>附录</span><span>G</span><span>对此有详细说明。表</span><span>1</span><span>显示了一个包含此特性的验证数据实例。</span></p>

<p><strong><span>在设定测试条件下确保超大器件完全充电</span></strong></p>

<p><span>在</span><span>JS-002</span><span>开发的数据收集阶段还发现了一个与测试仪相关的问题：放电之前，某些测试系统未将大验证模块或器件完全充电到设定电压。不同测试系统的大值场板充电电阻（位于充电电源和场板之间的串联电阻）不一致，影响到场板电压完全充电所需的延迟时间。结果，不同测试仪的第一峰值放电电流可能不同，影响</span><span>CDM</span><span>的通过</span><span>/</span><span>失败分类，尤其是大器件。</span></p>

<p><span>因此，工作小组撰写了详实的附录</span><span>H</span><span>（</span><span>“</span><span>确定适当的充电延迟时间以确保大模块或器件完全充电</span><span>”</span><span>），描述了用于确定器件完全充电所需延迟时间的程序。当出现峰值电流饱和点（</span><span>Ip</span><span>基本保持稳定，设置更长的延迟时间也不会使它改变）时，说明达到了适当的充电延迟时间，如图</span><span>7</span><span>所示。确定此延迟时间，确保放电之前，超大器件能够完全充电到设定的测试条件。</span></p>

<p><span><img alt="图7.峰值电流与充电时间延迟关系图示例，显示了饱和点/充电时间延迟9" data-entity-type="file" data-entity-uuid="f605870b-3629-4479-811f-5f5e2ceda545" src="http://new.eetrend.com/files/2021-02/wen_zhang_/100061764-122389-7.jpg&…; /><br />
<!--[endif]--></span></p>

<p><em><span>图</span></em><em><span>7.</span></em><em><span>峰值电流与充电时间延迟关系图示例，显示了饱和点</span></em><em><span>/</span></em><em><span>充电时间延迟</span></em><em><span>9</span></em></p>

<p><strong><span>电子行业逐步采用</span></strong><strong><span>JS-002</span></strong></p>

<p><span>对于采用</span><span>ESDA S5.3.1 CDM</span><span>标准的公司，</span><span>JS-002</span><span>标准取代了</span><span>S5.3.1</span><span>，应将</span><span>S5.3.1</span><span>废弃。对于先前使用</span><span>JESD22-C101</span><span>的公司，</span><span>JEDEC</span><span>可靠性测试规范文件</span><span>JESD47</span><span>（规定</span><span>JEDEC</span><span>电子元件的所有可靠性测试方法）最近进行了更新，要求用</span><span>JS-002</span><span>代替</span><span>JESD22-C101</span><span>（</span><span>2016</span><span>年末）。</span><span>JEDEC</span><span>会员公司转换到</span><span>JS-002</span><span>的过渡时期现已开始。很多公司（包括</span><span>ADI</span><span>和</span><span>Intel</span><span>）已经对所有新产品利用</span><span>JS-002</span><span>标准进行测试。</span></p>

<p><span>国际电工委员会</span><span>(IEC)</span><span>最近批准并更新了其</span><span>CDM</span><span>测试标准</span><span>IS 60749-2812</span><span>。此标准全盘纳入</span><span>JS-002</span><span>作为其指定测试标准。</span></p>

<p><span>汽车电子理事会</span><span>(AEC)</span><span>目前有一个</span><span>CDM</span><span>小组委员会，其正在更新</span><span>Q100-011</span><span>（集成电路）和</span><span>Q101-005</span><span>（无源器件）车用器件</span><span>CDM</span><span>标准文件以纳入</span><span>JS-002</span><span>，并结合</span><span>AEC</span><span>规定的测试使用条件。这些工作预计会在</span><span>2017</span><span>年底完成并获批准。</span></p>

<p><strong><span>结语</span></strong></p>

<p><span>观察</span><span>ESDA</span><span>提供的</span><span>CDM ESD</span><span>路线图，可知在更高</span><span>IO</span><span>性能的驱动下，</span><span>CDM</span><span>目标级别会继续降低。制造业对器件级</span><span>CDM ESD</span><span>耐受电压的认知比以往任何时候都更重要，而来自不同</span><span>CDM ESD</span><span>标准的不一致产品</span><span>CDM</span><span>结果是无法传达这一讯息的。</span><span>ANSI/ESDA/JEDEC JS-002</span><span>有机会成为第一个真正的适用于全行业的</span><span>CDM</span><span>测试标准。消除</span><span>CDM</span><span>测试头放电路径中的电容，可显著改善放电波形的质量。引入高带宽示波器用于验证，提高到五个测试条件波形验证级别，以及保证适当的充电延迟时间</span><span>——</span><span>所有这些措施显著降低了不同实验室的测试结果差异，改善了站点间的可重复性。这对确保向制造业提供一致的数据至关重要。电子行业接受</span><span>JS-002</span><span>标准之后，将有能力更好地应对前方的</span><span>ESD</span><span>控制挑战。</span></p>

<p><strong><span>参考文献</span></strong></p>

<p><span>1.</span><span><span>&nbsp;&nbsp;&nbsp;&nbsp; </span>Roger J. Peirce</span><span>。</span><span>“</span><span>ESD</span><span>损害的最常见原因</span><span>”</span><span>。</span><span lang="EN-US" xml:lang="EN-US">Evaluation Engineering</span><span>，</span><span lang="EN-US" xml:lang="EN-US">2002</span><span>年</span><span lang="EN-US" xml:lang="EN-US">11</span><span>月。</span></p>

<p><span lang="EN-US" xml:lang="EN-US">2.</span><span lang="EN-US" xml:lang="EN-US"><span>&nbsp;&nbsp;&nbsp;&nbsp; </span>ESD</span><span>目标级别工业理事会。</span><span lang="EN-US" xml:lang="EN-US">“</span><span>工业理事会白皮书</span><span lang="EN-US" xml:lang="EN-US">2</span><span>：</span><span>降低器件级</span><span lang="EN-US" xml:lang="EN-US">CDM ESD</span><span>规格和要求的一个案例</span><span lang="EN-US" xml:lang="EN-US">”</span><span>。</span><span lang="EN-US" xml:lang="EN-US">EOS/ESD</span><span>协会</span><span>，</span><span lang="EN-US" xml:lang="EN-US">2010</span><span>年</span><span lang="EN-US" xml:lang="EN-US">4</span><span>月。</span></p>

<p><span lang="EN-US" xml:lang="EN-US">3.</span><span lang="EN-US" xml:lang="EN-US"><span>&nbsp;&nbsp;&nbsp;&nbsp; </span>“</span><span lang="EN-US" xml:lang="EN-US">JEP157</span><span>：</span><span>推荐</span><span lang="EN-US" xml:lang="EN-US">ESD-CDM</span><span>目标级别</span><span lang="EN-US" xml:lang="EN-US">”</span><span>。</span><span lang="EN-US" xml:lang="EN-US">JEDEC</span><span>，</span><span lang="EN-US" xml:lang="EN-US">2009</span><span>年</span><span lang="EN-US" xml:lang="EN-US">10</span><span>月。</span></p>

<p><span lang="EN-US" xml:lang="EN-US">4.</span><span lang="EN-US" xml:lang="EN-US"><span>&nbsp;&nbsp;&nbsp;&nbsp; </span></span><span lang="EN-US" xml:lang="EN-US">EOS/ESD</span><span>协会路线图</span><span>。</span></p>

<p><span lang="EN-US" xml:lang="EN-US">5.</span><span lang="EN-US" xml:lang="EN-US"><span>&nbsp;&nbsp;&nbsp;&nbsp; </span>“</span><span lang="EN-US" xml:lang="EN-US">JESD22-C101F</span><span>：</span><span>微电子器件静电放电耐受阈值的场感应充电器件模型测试方法</span><span lang="EN-US" xml:lang="EN-US">”</span><span>。</span><span lang="EN-US" xml:lang="EN-US">JEDEC</span><span>，</span><span lang="EN-US" xml:lang="EN-US">2013</span><span>年</span><span lang="EN-US" xml:lang="EN-US">10</span><span>月。</span></p>

<p><span lang="EN-US" xml:lang="EN-US">6.</span><span lang="EN-US" xml:lang="EN-US"><span>&nbsp;&nbsp;&nbsp;&nbsp; </span>“</span><span lang="EN-US" xml:lang="EN-US">ANSI/ESD S5.3.1</span><span>：</span><span>静电放电灵敏度测试</span><span lang="EN-US" xml:lang="EN-US">——</span><span>充电器件模型</span><span lang="EN-US" xml:lang="EN-US">(CDM)</span><span>器件级别</span><span lang="EN-US" xml:lang="EN-US">”</span><span>。</span><span lang="EN-US" xml:lang="EN-US">EOS/ESD</span><span>协会</span><span>，</span><span lang="EN-US" xml:lang="EN-US">2009</span><span>年</span><span lang="EN-US" xml:lang="EN-US">12</span><span>月。</span></p>

<p><span lang="EN-US" xml:lang="EN-US">7.</span><span lang="EN-US" xml:lang="EN-US"><span>&nbsp;&nbsp;&nbsp;&nbsp; </span>“</span><span lang="EN-US" xml:lang="EN-US">AEC-Q100-011</span><span>：</span><span>充电器件模型</span><span lang="EN-US" xml:lang="EN-US">(CDM)</span><span>静电放电测试</span><span lang="EN-US" xml:lang="EN-US">”</span><span>。汽车电子理事会</span><span>，</span><span lang="EN-US" xml:lang="EN-US">2012</span><span>年</span><span lang="EN-US" xml:lang="EN-US">7</span><span>月。</span></p>

<p><span lang="EN-US" xml:lang="EN-US">8.</span><span lang="EN-US" xml:lang="EN-US"><span>&nbsp;&nbsp;&nbsp;&nbsp; </span>“</span><span lang="EN-US" xml:lang="EN-US">EIAJ ED-4701/300-2</span><span>，</span><span>测试方法</span><span lang="EN-US" xml:lang="EN-US">305</span><span>：</span><span>充电器件模型静电放电</span><span lang="EN-US" xml:lang="EN-US">(CDM-ESD)</span><span lang="EN-US" xml:lang="EN-US">”</span><span>。日本电子与信息技术行业协会</span><span>，</span><span lang="EN-US" xml:lang="EN-US">2004</span><span>年</span><span lang="EN-US" xml:lang="EN-US">6</span><span>月。</span></p>

<p><span lang="EN-US" xml:lang="EN-US">9.</span><span lang="EN-US" xml:lang="EN-US"><span>&nbsp;&nbsp;&nbsp;&nbsp; </span>“</span><span lang="EN-US" xml:lang="EN-US">ANSI/ESDA/JEDEC JS-002-2014</span><span>：</span><span>充电器件模型</span><span lang="EN-US" xml:lang="EN-US">(CDM)</span><span>器件级别</span><span lang="EN-US" xml:lang="EN-US">”</span><span>。</span><span lang="EN-US" xml:lang="EN-US">EOS/ESD</span><span>协会</span><span>，</span><span lang="EN-US" xml:lang="EN-US">2015</span><span>年</span><span lang="EN-US" xml:lang="EN-US">4</span><span>月。</span></p>

<p><span lang="EN-US" xml:lang="EN-US">10.</span><span lang="EN-US" xml:lang="EN-US"><span>&nbsp;&nbsp;&nbsp; </span>Alan W. Righter</span><span>、</span><span lang="EN-US" xml:lang="EN-US">Terry Welsher</span><span>和</span><span lang="EN-US" xml:lang="EN-US">Marti Ferris</span><span>。</span><span>“</span><span>迈向联合</span><span>ESDA/JEDEC CDM</span><span>标准：方法、实验和结果</span><span>”</span><span>。</span><span>EOS/ESD</span><span>论文集，</span><span>2012</span><span>年</span><span>9</span><span>月。</span></p>

<p><span>11.</span><span><span>&nbsp;&nbsp;&nbsp; </span></span><span lang="EN-US" xml:lang="EN-US">Theo Smedes</span><span>、</span><span lang="EN-US" xml:lang="EN-US">Michal Polweski</span><span>、</span><span lang="EN-US" xml:lang="EN-US">Arjan van IJzerloo</span><span>、</span><span lang="EN-US" xml:lang="EN-US">Jean-Luc Lefebvre</span><span>和</span><span lang="EN-US" xml:lang="EN-US">Marcel Dekker</span><span>。</span><span>“</span><span>CDM</span><span>校准程序的隐患</span><span>”</span><span>。</span><span>EOS/ESD</span><span>论文集，</span><span>2010</span><span>年</span><span>10</span><span>月。</span></p>

<p><span>12.</span><span><span>&nbsp;&nbsp;&nbsp; </span>“</span><span>IEC IS 60749-28</span><span>，静电放电</span><span>(ESD)</span><span>灵敏度测试</span><span>——</span><span>充电器件模型</span><span>(CDM) - </span><span>器件级别</span><span>”</span><span>。国际电工委员会，</span><span>2017</span><span>年。</span></p>

<p><span>Alan Righter</span></p>

<p><span lang="EN-US" xml:lang="EN-US">Alan [alan.righter@analog.com] is a senior staff ESD engineer in th corporate ESD department at Analog Devices, San Jose, CA. He works with ADI design/product engineering teams worldwide on whole chip ESD planning/design, ESD testing, ESD failure analysis, and EOS issues with internal and external customers. Prior to ADI, Alan was with Sandia National Laboratories, Albuquerque, NM for 13 years, where he was involved in IC design, test, product engineering, reliability testing, and failure analysis. Alan completed his B.S.E.E. and M.S.E.E. at Arizona State University in 1982 and 1984, respectively, and his Ph.D. at the University of New Mexico in 1996. In 2007, Alan joined all Standards Device Testing Working Groups (WG5.x) and is also a member of Systems and Simulators WG 14. He was appointed chair of WG 5.3.1, Charged Device Model, in 2008 and currently serves as ESDA Chairperson of the expanded Joint (ESDA/JEDEC) CDM Working Group, which recently completed the new ESDA/JEDEC Joint Standard JS-002. Alan is also currently Vice President of the ESD Association. Alan has been active in the EOS/ESD Symposium as author/co-author of 10 articles, and he is also currently ESDA Events Director. Alan also is active in the Industry Council on ESD Target Levels.</span></p>

<p><span lang="EN-US" xml:lang="EN-US">Alan [alan.righter@analog.com]</span><span>是</span><span lang="EN-US" xml:lang="EN-US">ADI</span><span>公司位于美国加州圣何塞的企业</span><span lang="EN-US" xml:lang="EN-US">ESD</span><span>部的高级</span><span lang="EN-US" xml:lang="EN-US">ESD</span><span>工程师。他与</span><span>ADI</span><span>公司全球设计</span><span>/</span><span>产品工程团队一起负责整个芯片的</span><span>ESD</span><span>规划</span><span>/</span><span>设计、</span><span>ESD</span><span>测试、</span><span>ESD</span><span>故障分析以及内部和外部客户存在的</span><span>EOS</span><span>问题。加入</span><span>ADI</span><span>之前，</span><span>Alan</span><span>在</span><span>Sandia National Laboratories</span><span>（位于美国新墨西哥州阿尔伯克基市）工作了</span><span>13</span><span>年，参与了</span><span>IC</span><span>设计、测试、产品工程、可靠性测试和故障分析。</span><span>Alan</span><span>于</span><span>1982</span><span>年和</span><span>1984</span><span>年分别获得亚利桑那州立大学电气工程学士学位和电气工程硕士学位，并于</span><span>1996</span><span>年获得新墨西哥大学博士学位。</span><span>2007</span><span>年，</span><span>Alan</span><span>加入了所有的标准设备测试工作组</span><span>(WG5.x)</span><span>，同时也是系统和仿真器</span><span>WG 14</span><span>的成员。他于</span><span>2008</span><span>年被任命为</span><span>WG 5.3.1</span><span>（充电装置模型）的主席，目前担任扩展联合</span><span>(ESDA/JEDEC) CDM</span><span>工作组的</span><span>ESDA</span><span>主席，最近完成了新的</span><span>ESDA/JEDEC</span><span>联合标准</span><span>JS-002</span><span>。</span><span>Alan</span><span>目前也是</span><span>ESD</span><span>协会的副主席。作为</span><span>10</span><span>篇文章的作者</span><span>/</span><span>合著者，</span><span>Alan</span><span>一直积极参加</span><span>EOS/ESD</span><span>研讨会，他目前也是</span><span>ESDA</span><span>事件总监。</span><span>Alan</span><span>在</span><span>ESD</span><span>目标级别行业理事会中也很活跃。</span></p>

<p><span lang="EN-US" xml:lang="EN-US">Brett Carn</span></p>

<p><span lang="EN-US" xml:lang="EN-US">Brett Carn [brett.w.carn@intel.com] joined Intel Corporation in 1999 and is a principal engineer in the Corporate Quality Network. He has actively worked in the field f device level ESD at Intel. In that role, Brett chairs the Intel ESD Council overseeing component level ESD and latch-up testing across all Intel sites worldwide, defining all internal tet specifications, eviewing all Intel ESD design rules, overseeing/defining the ESD taget levels for all Intel products worldwide, and leading postsilicon ESD debug on many products. In more recent years, Brett has also been actively involved with addressing EOS challenges. Prior to joining Intel, he worked for Lattice Semiconductor for 13 years, where he started working on ESD in the early 1990s. Since 2007, Brett has been a member of the Industry Council on ESD Target Levels and has helped author several white papers, and also served as the lead editor on four white papers. Brett is an active member of the ESDA and a current member of the ESDA Board of Directors. Brett is also a member of the ESDA Education Council, overseeing all online training, and is the current chair of the Technical and Advisory Support (TAS) Committee and a member of several ESDA working groups. Brett received his B.S. in electrical engineering from Portland State University in 1986.</span></p>

<p><span lang="EN-US" xml:lang="EN-US">Brett Carn [brett.w.carn@intel.com]</span><span>于</span><span lang="EN-US" xml:lang="EN-US">1999</span><span>年加入英特尔公司</span><span>，</span><span>现在是企业质量网络的首席工程师。他一直关注英特尔器件级别</span><span>ESD</span><span>领域。作为首席工程师，</span><span>Brett</span><span>主持英特尔</span><span>ESD</span><span>理事会，负责全球所有英特尔网站的元件级别</span><span>ESD</span><span>和闩锁测试，定义所有内部测试规范，审查所有英特尔</span><span>ESD</span><span>设计规则，监督</span><span>/</span><span>定义全球所有英特尔产品的</span><span>ESD</span><span>目标级别并领导许多产品的后晶片</span><span>ESD</span><span>调试。最近几年，</span><span>Brett</span><span>还一直积极致力于解决</span><span>EOS</span><span>挑战。加入英特尔之前，他在</span><span>Lattice Semiconductor</span><span>工作了</span><span>13</span><span>年，在</span><span>20</span><span>世纪</span><span>90</span><span>年代早期便开始从事</span><span>ESD</span><span>相关工作。从</span><span>2007</span><span>年开始，</span><span>Brett</span><span>一直是</span><span>ESD</span><span>目标级别行业理事会的成员，协助撰写了数本白皮书，同时担任四本白皮书的责任编辑。</span><span>Brett</span><span>是</span><span>ESDA</span><span>的积极成员，目前也是</span><span>ESDA</span><span>董事会的成员之一。</span><span>Brett</span><span>也是</span><span>ESDA</span><span>教育委员会的成员，负责监督所有在线培训，目前是技术和咨询支持</span><span>(TAS)</span><span>委员会的主席以及几个</span><span>ESDA</span><span>工作组的成员。</span><span>Brett</span><span>于</span><span>1986</span><span>年获得波特兰州立大学电气工程学士学位。</span></p>

<p><span>The EOS/ESD Association</span></p>

<p><span>EOS/ESD</span><span>协会</span></p>

<p><span>The EOS/ESD Association is the largest industry group dedicated to advancing the theory and the practice of ESD avoidance, with more than 2000 members worldwide. </span><span lang="EN-US" xml:lang="EN-US">Readers can learn more about the Association and its work at</span></p>

<p><span>EOS/ESD</span><span>协会是最大的行业组织，致力于实施</span><span>ESD</span><span>保护理论和实践，在全球拥有</span><span>2000</span><span>多名成员。读者可通过以下网址了解有关该协会及其工作的更多信息：</span><span> </span></p>